Photovoltaic device including front electrode having titanium oxide inclusive layer with high refractive index

ABSTRACT

Certain example embodiments of this invention relate to an electrode (e.g., front electrode) for use in a photovoltaic device or the like. In certain example embodiments, a transparent conductive oxide (TCO) of the front electrode for use in a photovoltaic device is of or includes titanium oxide doped with one or more of Nb, Zn and/or Al. Additional layers may also be provided in the front electrode in certain example embodiments. It has been found that the use of transparent conductive TiO x (:Nb) or TiZnO x (:Al and/or Nb), in a front electrode of a photovoltaic device, is advantageous in that such materials have a high refractive index (n) and have a higher transparency than conventional titanium suboxide (TiO x ). Thus, the use of such materials in the context of a front electrode of a photovoltaic device reduces light reflection due to the high refractive index, and increases transmission into the active semiconductor film due to the higher transmission characteristics thereof, thereby improving the efficiency of the device.

Certain example embodiments of this invention relate to an electrode (e.g., front electrode) for use in a photovoltaic device or the like. In certain example embodiments, a transparent conductive oxide (TCO) of the front electrode for use in a photovoltaic device is of or includes titanium oxide doped with one or more of Nb, Zn and/or Al. Additional layers may also be provided in the front electrode in certain example embodiments. It has been found that the use of transparent conductive TiO_(x)(:Nb) or TiZnO_(x)(:Al and/or Nb), in a front electrode of a photovoltaic device, is advantageous in that such materials have a high refractive index (n) and have a higher transparency than conventional titanium suboxide (TiO_(x)). Thus, the use of such materials in the context of a front electrode of a photovoltaic device (especially when positioned adjacent the active semiconductor layer) reduces light reflection due to the high refractive index, and'increases transmission into the active semiconductor film due to the higher transmission characteristics thereof, thereby improving the efficiency of the device.

BACKGROUND AND SUMMARY OF EXAMPLE EMBODIMENTS OF INVENTION

Photovoltaic (PV) devices are known in the art (e.g., see U.S. Pat. Nos. 6,784,361, 6,288,325, 6,613,603 and 6,123,824, the disclosures of which are hereby incorporated herein by reference). Amorphous silicon (a-Si) and CdS/CdTe type photovoltaic devices, for example, each include a front contact or electrode. Typically, the front electrode is made of a transparent conductive oxide (TCO) such as tin oxide or zinc oxide formed on a substrate such as a glass substrate. Accordingly, it will be appreciated that zinc oxide doped with Al (ZnAlO_(x)) is a known TCO material for use as an electrode for a photovoltaic device.

Unfortunately, transparent conductive ZnAlO_(x) has a relatively low refractive index (n) of around 2.0. A TCO layer having such a low refractive index (n), if provided in certain locations of a PV device, tends to reflect significant amounts of incoming solar energy away from the active semiconductor film of the photovoltaic device. In other words, when located at certain positions, the low refractive index material causes significant amounts of incoming energy to be wasted as it is reflected away from the active layer thereby reducing the efficiency of the photovoltaic device.

It is apparent from the above that there exists a need in the art for an improved TCO material which, when positioned in certain locations, is capable of reducing reflections of incoming solar energy without blocking transmission thereof, so as to improve efficiency of the photovoltaic device.

In certain example embodiments, a transparent conductive oxide (TCO) of the front electrode for use in a photovoltaic device is of or includes titanium oxide doped with one or more of Nb, Zn and/or Al. Additional conductive layers may also be provided in the front electrode in certain example embodiments. It has been found that the use of TiO_(x)(:Nb) or TiZnO_(x)(:Al and/or Nb) TCO, in a front electrode of a photovoltaic device, is advantageous in that such materials have a high refractive index (n) (e.g., of at least 2.15, more preferably at least 2.2, even more preferably at least 2.3, and possibly at least 2.4 at 550 nm) and have a higher transparency to solar energy used by the PV device than conventional titanium suboxide (TiO_(x)). Thus, the use of such materials in the context of a front electrode of a photovoltaic device (especially when positioned adjacent and contacting the active semiconductor film of the device) reduces light reflection due to the high refractive index, and increases transmission into the active semiconductor film due to the higher transmission characteristics thereof, thereby improving efficiency of the device.

In certain example embodiments of this invention, the TCO may be sputter-deposited in a non-stoichiometric oxygen deficient form, or may be deposited in any other suitable manner. Sputtering at approximately room temperature may be used for the deposition of the electrode in certain example instances, although other techniques may instead be used in certain instances.

In certain example embodiments, the electrode of or including TiO_(x)(:Nb) or TiZnO_(x)(:Al and/or Nb) may be used as any suitable electrode in any suitable electronic device, such as a photovoltaic device, a flat-panel display device, and/or an electro-optical device.

In certain example embodiments of this invention, the TCO (e.g., TiO_(x)(:Nb) or TiZnO_(x)(:Al and/or Nb)) layer or the overall front electrode may have a sheet resistance (R_(s)) of from about 7-50 ohms/square, more preferably from about 10-25 ohms/square, and most preferably from about 10-15 ohms/square using a reference example non-limiting thickness of from about 1,000 to 2,000 angstroms, although other thicknesses are possible.

In certain example embodiments of this invention, there is provided a photovoltaic device comprising: a front substrate; a front electrode; a semiconductor film, wherein the front electrode is located between at least the front substrate and the semiconductor film; and wherein the front electrode of the photovoltaic device comprises a first conductive layer and a second conductive layer, wherein the second conductive layer is located between at least the first conductive layer and the semiconductor film, and wherein the second conductive layer comprises titanium zinc oxide doped with aluminum and/or niobium.

In other example embodiments, there is provided a photovoltaic device comprising: a front glass substrate; a front electrode; a semiconductor film, wherein the front electrode is located between at least the front substrate and the semiconductor film; and wherein the front electrode of the photovoltaic device comprises a first conductive layer and a second conductive layer, wherein the second conductive layer is located between at least the first conductive layer and the semiconductor film, and wherein the second conductive layer comprises titanium oxide doped niobium.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross sectional view of an example photovoltaic device according to an example embodiment of this invention.

FIG. 2 is a cross sectional view of the photovoltaic device according to another example embodiment of this invention.

FIG. 3 is a cross sectional view of the photovoltaic device according to another example embodiment of this invention.

FIG. 4 is a percent transmission (T %) versus wavelength (nm) graph illustrating transmission spectra into a hydrogenated a-Si thin film of a photovoltaic device comparing examples of the FIG. 2 embodiment of this invention versus a comparative example (ZnAlOx) where a zinc aluminum oxide TCO was used instead adjacent the semiconductor; this shows that the examples of this invention have increased transmission in at least a substantial part of the approximately 450-700 nm wavelength range and thus increased photovoltaic module output power, compared to the comparative example. The stacks tested in FIG. 4 are shown in the table of FIG. 6.

FIG. 5 is a percent transmission (T %) versus wavelength (nm) graph illustrating transmission spectra into a hydrogenated a-Si thin film of a photovoltaic device comparing examples of the FIG. 3 embodiment of this invention versus a comparative example (TCO) where only a zinc aluminum oxide TCO was used instead adjacent the semiconductor; this shows that the examples of this invention (10 ohm TCO+50 nm TiNbOx) have increased transmission in at least a substantial part of the approximately 450-700 nm wavelength range and thus increased photovoltaic module output power, compared to the comparative example (10 ohm TCO). The stacks tested in FIG. 5 are shown in the table of FIG. 7.

FIG. 6 is a table setting forth the layer stacks tested in FIG. 4.

FIG. 7 is a table setting forth the layer stacks tested in FIG. 5.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS OF THE INVENTION

Referring now more particularly to the figures in which like reference numerals refer to like parts/layers in the several views.

Photovoltaic devices such as solar cells convert solar radiation into usable electrical energy. The energy conversion occurs typically as the result of the photovoltaic effect. Solar radiation (e.g., sunlight) impinging on a photovoltaic device and absorbed by an active region of semiconductor material (e.g., a semiconductor film including one or more semiconductor layers such as a-Si layers, the semiconductor sometimes being called an absorbing layer or film) generates electron-hole pairs in the active region. The electrons and holes may be separated by an electric field of a junction in the photovoltaic device. The separation of the electrons and holes by the junction results in the generation of an electric current and voltage. In certain example embodiments, the electrons flow toward the region of the semiconductor material having n-type conductivity, and holes flow toward the region of the semiconductor having p-type conductivity. Current can flow through an external circuit connecting the n-type region to the p-type region as light continues to generate electron-hole pairs in the photovoltaic device.

In certain example embodiments, single junction amorphous silicon (a-Si) photovoltaic devices include three semiconductor layers. In particular, a p-layer, an n-layer and an i-layer which is intrinsic. The amorphous silicon film (which may include one or more layers such as p, n and i type layers) may be of hydrogenated amorphous silicon in certain instances, but may also be of or include hydrogenated amorphous silicon carbon or hydrogenated amorphous silicon germanium, or the like, in certain example embodiments of this invention. For example and without limitation, when a photon of light is absorbed in the i-layer it gives rise to a unit of electrical current (an electron-hole pair). The p and n-layers, which contain charged dopant ions, set up an electric field across the i-layer which draws the electric charge out of the i-layer and sends it to an optional external circuit where it can provide power for electrical components. It is noted that while certain example embodiments of this invention are directed toward amorphous-silicon based photovoltaic devices, this invention is not so limited and may be used in conjunction with other types of photovoltaic devices in certain instances including but not limited to devices including other types of semiconductor material, single or tandem thin-film solar cells, CdS and/or CdTe (including CdS/CdTe) photovoltaic devices, polysilicon and/or microcrystalline Si photovoltaic devices, and the like.

FIG. 1 is a cross sectional view of a photovoltaic device according to an example embodiment of this invention. The photovoltaic device includes transparent front glass substrate 1 (other suitable material may also be used for the substrate instead of glass in certain instances), optional dielectric layer(s) 2, multilayer front electrode 3, active semiconductor film 5 of or including one or more semiconductor layers (such as pin, pn, pinpin tandem layer stacks, or the like), back electrode/contact 7 which may be of a TCO or a metal, an optional encapsulant 9 or adhesive of a material such as ethyl vinyl acetate (EVA) or the like, and an optional superstrate 11 of a material such as glass. Of course, other layer(s) which are not shown may also be provided in the device. Front glass substrate 1 and/or rear superstrate (substrate) 11 may be made of soda-lime-silica based glass in certain example embodiments of this invention; and it may have low iron content and/or an antireflection coating thereon to optimize transmission in certain example instances. While substrates 1, 11 may be of glass in certain example embodiments of this invention, other materials such as quartz, plastics or the like may instead be used for substrate(s) 1 and/or 11. Moreover, superstrate 11 is optional in certain instances. Glass 1 and/or 11 may or may not be thermally tempered and/or patterned in certain example embodiments of this invention. Additionally, it will be appreciated that the word “on” as used herein covers both a layer being directly on and indirectly on something, with other layers possibly being located therebetween.

Dielectric layer(s) 2 may be of any substantially transparent material such as a metal oxide and/or nitride which has a refractive index of from about 1.5 to 2.5, more preferably from about 1.6 to 2.5, more preferably from about 1.6 to 2.2, more preferably from about 1.6 to 2.0, and most preferably from about 1.6 to 1.8. However, in certain situations, the dielectric layer 2 may have a refractive index (n) of from about 2.3 to 2.5. Example materials for dielectric layer 2 include one or more of silicon oxide, silicon nitride, silicon oxynitride, zinc oxide, tin oxide, titanium oxide (e.g., TiO₂), aluminum oxynitride, aluminum oxide, or mixtures thereof. Dielectric layer(s) 2 functions as a barrier layer in certain example embodiments of this invention, to reduce materials such as sodium from migrating outwardly from the glass substrate 1 and reaching the IR reflecting layer(s) and/or semiconductor. Moreover, dielectric layer 2 is material having a refractive index (n) in the range discussed above, in order to reduce visible light reflection and thus increase transmission of visible light (e.g., light from about 450-700 nm and/or 450-600 nm) through the coating and into the semiconductor 5 which leads to increased photovoltaic module output power.

Still referring to FIG. 1, multilayer front electrode 3 in the example embodiment shown in FIG. 1, which is provided for purposes of example only and is not intended to be limiting, includes from the glass substrate 1 outwardly first transparent conductive oxide (TCO) or dielectric layer 3 a, first conductive substantially metallic IR reflecting layer 3 b, second TCO 3 c, second conductive substantially metallic IR reflecting layer 3 d, third TCO 3 e, and transparent conductive overcoat or buffer layer 3 f of or including TiO_(x)(Nb) or TiZnO_(x)(:Al and/or Nb). Optionally, layer 3 a may be a dielectric layer instead of a TCO in certain example instances and serve as a seed layer for the layer 3 b. This multilayer film 3 makes up the front electrode in certain example embodiments of this invention. Of course, it is possible for certain layers of electrode 3 to be removed in certain alternative embodiments of this invention (e.g., one or more of layers 3 a, 3 c, 3 d and/or 3 e may be removed), and it is also possible for additional layers to be provided in the multilayer electrode 3. Front electrode 3 may be continuous across all or a substantial portion of glass substrate 1, or alternatively may be patterned into a desired design (e.g., stripes), in different example embodiments of this invention. Each of layers/films 1-3 is substantially transparent in certain example embodiments of this invention.

First and second conductive substantially metallic IR reflecting layers 3 b and 3 d may be of or based on any suitable IR reflecting material such as silver, gold, or the like. These materials reflect significant amounts of IR radiation, thereby reducing the amount of IR which reaches the semiconductor film 5. Since IR increases the temperature of the device, the reduction of the amount of IR radiation reaching the semiconductor film 5 is advantageous in that it reduces the operating temperature of the photovoltaic module so as to increase module output power. Moreover, the highly conductive nature of these substantially metallic layers 3 b and/or 3 d permits the conductivity of the overall electrode 3 to be increased. In certain example embodiments of this invention, the multilayer electrode 3 has a sheet resistance of less than or equal to about 12 ohms/square, more preferably less than or equal to about 9 ohms/square, and even more preferably less than or equal to about 6 ohms/square. Again, the increased conductivity (same as reduced sheet resistance) increases the overall photovoltaic module output power, by reducing resistive losses in the lateral direction in which current flows to be collected at the edge of cell segments. It is noted that first and second conductive substantially metallic IR reflecting layers 3 b and 3 d (as well as the other layers of the electrode 3) are thin enough so as to be substantially transparent to visible light. In certain example embodiments of this invention, first and/or second conductive substantially metallic IR reflecting layers 3 b and/or 3 d are each from about 3 to 12 nm thick, more preferably from about 5 to 10 nm thick, and most preferably from about 5 to 8 nm thick. In embodiments where one of the layers 3 b or 3 d is not used, then the remaining conductive substantially metallic IR reflecting layer may be from about 3 to 18 nm thick, more preferably from about 5 to 12 nm thick, and most preferably from about 6 to 11 nm thick in certain example embodiments of this invention. These thicknesses are desirable in that they permit the layers 3 b and/or 3 d to reflect significant amounts of IR radiation, while at the same time being substantially transparent to visible radiation which is permitted to reach the semiconductor 5 to be transformed by the photovoltaic device into electrical energy. The highly conductive IR reflecting layers 3 b and 3 d attribute to the overall conductivity of the electrode 3 much more than the TCO layers; this allows for expansion of the process window(s) of the TCO layer(s) which has a limited window area to achieve both high conductivity and transparency.

First, second, and third TCO layers 3 a, 3 c and 3 e, respectively, may be of any suitable TCO material including but not limited to conducive forms of zinc oxide, zinc aluminum oxide, tin oxide, indium-tin-oxide, indium zinc oxide (which may or may not be doped with silver), TiO_(x)(:Nb), TiZnO_(x)(:Al and/or Nb), or the like. These layers are typically substoichiometric so as to render them conductive as is known in the art. For example, these layers are made of material(s) which gives them a resistance of no more than about 10 ohm-cm (more preferably no more than about 1 ohm-cm, and most preferably no more than about 20 mohm-cm). One or more of these layers may be doped with other materials such as fluorine, aluminum, antimony or the like in certain example instances, so long as they remain conductive and substantially transparent to visible light. In certain example embodiments of this invention, TCO layers 3 c and/or 3 e are thicker than layer 3 a (e.g., at least about 5 nm, more preferably at least about 10, and most preferably at least about 20 or 30 nm thicker). In certain example embodiments of this invention, TCO layer 3 a is from about 3 to 80 nm thick, more preferably from about 5-30 nm thick, with an example thickness being about 10 nm. Optional layer 3 a is provided mainly as a seeding layer for layer 3 b and/or for antireflection purposes, and its conductivity is not as important as that of layers 3 b-3 e (thus, layer 3 a may be a dielectric instead of a TCO in certain example embodiments). In certain example embodiments of this invention, TCO layer 3 c is from about 20 to 150 nm thick, more preferably from about 40 to 120 nm thick, with an example thickness being about 74-75 nm. In certain example embodiments of this invention, TCO layer 3 e is from about 20 to 180 nm thick, more preferably from about 40 to 130 nm thick, with an example thickness being about 94 or 115 nm.

Transparent conductive overcoat or buffer layer 3 f of or including TiO_(x)(:Nb) and/or TiZnO_(x)(:Al and/or Nb) has been found to be particularly advantageous, especially when located adjacent and contacting the semiconductor film 5. The transparent front electrode serves as both a window and an electrode in the photovoltaic device. It is desired to have low resistivity and high transparency in the PV sensitive wavelength range. Glass 1 has a refractive index (n) of about 1.5 and photovoltaic semiconductor materials 5 (e.g., a-Si; a-Si/uc-Si; CdS/CdTe; CIS; etc.) have refractive indices (n) of at least 3.4. In order to reduce reflection loss caused by big index differences between the glass 1 and semiconductor 5, the use of a transparent conductive oxide having a refractive index (n) of at least 2.15 (more preferably at least 2.2, even more preferably at least 2.3, and possibly at least 2.4 at 550 nm) is provided. When positioned adjacent the semiconductor film 5 as a layer 3 f as shown in FIG. 1, this results in a reduction in reflection loss thereby improving the efficiency of the photovoltaic (PV) device. The relatively high refractive index of layer 3 f is compared to the lower refractive indices of 1.8 to 2.1 associated with TCOs such as SnO_(x)(:Sb), ZnO_(x)(:Al), ZnO_(x)(:Ga), and InSnO_(x).

Transparent conductive layer 3 f (or 4 f) may thus comprise titanium zinc oxide doped with aluminum and/or niobium. In certain example embodiments, the titanium zinc oxide is doped with from about 0.01 to 10% Al and/or Nb, more preferably from about 0.02 to 7% Al and/or Nb, and most preferably from about 0.1 to 5% Al and/or Nb. In other example embodiments, transparent conductive layer 3 f (or 40 may comprise titanium oxide doped niobium (Al may also be provided in such embodiments, in addition to Nb); in certain example embodiments the titanium oxide is doped with from about 0.01 to 10% Nb, more preferably from about 0.02 to 7% Nb, and most preferably from about 0.1 to 5% Nb. Other dopants may also be provided in certain instances.

Transparent conductive layers TiO_(x)(:Nb) and/or TiZnO_(x)(:Al and/or Nb) have a refractive index of at least 2.2 in most situations, are conductive, and have transparency higher than TiO_(x). Thus, the use of these materials is superior to pure TiO_(x). However, the resistivity of these materials sometimes tends to be high, so their use in connection with another more conductive layer in the context of a front electrode of a PV device is desirable in certain example embodiments of this invention (e.g., see FIGS. 1-2).

In certain example embodiments of this invention, the photovoltaic device may be made by providing glass substrate 1, and then depositing (e.g., via sputtering or any other suitable technique) multilayer electrode 3 on the substrate 1. Thereafter the structure including substrate 1 and front electrode 3 is coupled with the rest of the device in order to form the photovoltaic device shown in FIG. 1. For example, the semiconductor layer 5 may then be formed over the front electrode on substrate 1. Alternatively, the back contact 7 and semiconductor 5 may be fabricated/formed on substrate 11 (e.g., of glass or other suitable material) first; then the electrode 3 and dielectric 2 may be formed on semiconductor 5 and encapsulated by the substrate 1 via an adhesive such as EVA.

The alternating nature of the TCO layers 3 a, 3 c and/or 3 e, 3 f, and the conductive substantially metallic IR reflecting layers 3 b and/or 3 d, is also advantageous in that it also one, two, three, four or all of the following advantages to be realized: (a) reduced sheet resistance (R_(s)) of the overall electrode 3 and thus increased conductivity and improved overall photovoltaic module output power; (b) increased reflection of infrared (IR) radiation by the electrode 3 thereby reducing the operating temperature of the semiconductor 5 portion of the photovoltaic module so as to increase module output power; (c) reduced reflection and increased transmission of light in the visible region of from about 450-700 nm (and/or 450-600 nm) by the front electrode 3 which leads to increased photovoltaic module output power; (d) reduced total thickness of the front electrode coating 3 which can reduce fabrication costs and/or time; and/or (e) an improved or enlarged process window in forming the TCO layer(s) because of the reduced impact of the TCO's conductivity on the overall electric properties of the module given the presence of the highly conductive substantially metallic layer(s).

The active semiconductor region or film 5 may include one or more Payers, and may be of any suitable material. For example, the active semiconductor film 5 of one type of single junction amorphous silicon (a-Si) photovoltaic device includes three semiconductor layers, namely a p-layer, an n-layer and an i-layer. The p-type a-Si layer of the semiconductor film 5 may be the uppermost portion of the semiconductor film 5 in certain example embodiments of this invention; and the i-layer is typically located between the p and n-type layers. These amorphous silicon based layers of film 5 may be of hydrogenated amorphous silicon in certain instances, but may also be of or include hydrogenated amorphous silicon carbon or hydrogenated amorphous silicon germanium, hydrogenated microcrystalline silicon, or other suitable material(s) in certain example embodiments of this invention. It is possible for the active region 5 to be of a double-junction or triple-junction type in alternative embodiments of this invention. CdTe and/or CdS may also be used for semiconductor film 5 in alternative embodiments of this invention.

Back contact, reflector and/or electrode 7 may be of any suitable electrically conductive material. For example and without limitation, the back contact or electrode 7 may be of a TCO and/or a Metal in certain instances. Example TCO materials for use as back contact or electrode 7 include indium zinc oxide, indium-tin-oxide (ITO), tin oxide, and/or zinc oxide which may be doped with aluminum (which may or may not be doped with silver). The TCO of the back contact 7 may be of the single layer type or a multi-layer type in different instances. Moreover, the back contact 7 may include both a TCO portion and a metal portion in certain instances. For example, in an example multi-layer embodiment, the TCO portion of the back contact 7 may include a layer of a material such as indium zinc oxide (which may or may not be doped with silver), indium-tin-oxide (ITO), tin oxide, and/or zinc oxide closest to the active region 5, and the back contact may include another conductive and possibly reflective layer of a material such as silver, molybdenum, platinum, steel, iron, niobium, titanium, chromium, bismuth, antimony, or aluminum further from the active region 5 and closer to the superstrate 11. The metal portion may be closer to superstrate 11 compared to the TCO portion of the back contact 7.

The photovoltaic module may be encapsulated or partially covered with an encapsulating material such as encapsulant 9 in certain example embodiments. An example encapsulant or adhesive for layer 9 is EVA or PVB. However, other materials such as Tedlar type plastic, Nuvasil type plastic, Tefzel type plastic or the like may instead be used for layer 9 in different instances.

While the electrode 3 is used as a front electrode in a photovoltaic device in certain embodiments of this invention described and illustrated herein, it is also possible to use the electrode 3 as another electrode in the context of a photovoltaic device or otherwise.

FIG. 2 is a cross sectional view of a photovoltaic device according to still another example embodiment of this invention. The photovoltaic device of the FIG. 2 embodiment includes optional antireflective (AR) layer 1 a on the light incident side of the front glass substrate 1 (of any suitable material); first dielectric layer 2 a of or including one or more of silicon nitride (e.g., Si₃N₄ or other suitable stoichiometry), silicon oxynitride, silicon oxide (e.g., SiO₂ or other suitable stoichiometry), and/or tin oxide (e.g., SnO₂ or other suitable stoichiometry); second dielectric layer 2 b of or including titanium oxide (e.g., TiO₂ or other suitable stoichiometry) and/or niobium oxide; third layer 2 c (which may be a dielectric or a TCO) which may optionally function as a seed layer (e.g., of or including zinc oxide, zinc aluminum oxide, tin oxide, tin antimony oxide, indium zinc oxide, or the like) for the silver based layer 4 c; conductive silver based IR reflecting layer 4 c; optional overcoat or contact layer 4 d (which may be a dielectric or conductive) of or including an oxide of Ni and/or Cr, NiCr, Ti, an oxide of Ti, zinc aluminum oxide, or the like; TCO 4 e (e.g., including one or more layers) of or including zinc oxide, zinc aluminum oxide, tin oxide (which may or may not be doped with fluorine), tin antimony oxide, zinc tin oxide, indium tin oxide, indium zinc oxide, and/or zinc gallium aluminum oxide; TCO buffer layer 4 f of or including TiO_(x)(:Nb) and/or TiZnO_(x)(:Al and/or Nb); semiconductor film 5 of or including one or more layers such as CdS/CdTe, a-Si, or the like (e.g., film 5 may be made up of a layer of or including CdS adjacent layer 4 f, and a layer of or including CdTe adjacent layer 7); optional back contact/electrode/reflector 7 of aluminum or the like; optional adhesive 9 of or including a polymer such as PVB; and optional back/rear glass substrate 11. In certain example embodiments of this invention, dielectric layer 2 a may be from about 10-20 nm thick, more preferably from about 12-18 nm thick; layer 2 b may be from about 10-20 nm thick, more preferably from about 12-18 nm thick; layer 2 c may be from about 5-20 nm thick, more preferably from about 5-15 nm thick (layer 2 c is thinner than one or both of layers 2 a and 2 b in certain example embodiments); layer 4 c may be from about 5-20 nm thick, more preferably from about 6-10 nm thick; layer 4 d may be from about 0.2 to 5 nm thick, more preferably from about 0.5 to 2 nm thick; TCO film 4 e may be from about 50-200 nm thick, more preferably from about 75-150 nm thick, and may have a resistivity of no more than about 100 mΩ in certain example instances; and buffer layer 4 f may be from about 10-50 nm thick, more preferably from about 20-40 nm thick and may have a resistivity of no more than about 1 Me-cm in certain example instances. Moreover, the surface of glass 1 closest to the sun may be patterned via etching or the like in certain example embodiments of this invention. The TiO_(x)(:Nb) and/or TiZnO_(x)(:Al and/or Nb) inclusive layer 4 f in the FIG. 2 embodiment is advantageous for the reasons discussed above in connection with the FIG. 1 embodiment.

Still referring to the FIG. 2 embodiment, semiconductor film 5 may include a single pin or pn semiconductor structure, or a tandem semiconductor structure in different embodiments of this invention. Semiconductor 5 may be of or include silicon in certain example instances. In other example embodiments, semiconductor film 5 may include a first layer of or including CdS (e.g., window layer) adjacent or closest to layer 4 f and a second semiconductor layer of or including CdTe (e.g., main absorber) adjacent or closest to the back electrode or contact 7.

Also referring to FIG. 2, in certain example embodiments, first dielectric layer 2 a has a relatively low refractive index (n) (e.g., n of from about 1.7 to 2.2, more preferably from about 1.8 to 2.2, still more preferably from about 1.95 to 2.1, and most preferably from about 2.0 to 2.08), second dielectric layer 2 b has a relatively high (compared to layer 2 a) refractive index (n) (e.g., n of from about 2.2 to 2.6, more preferably from about 2.3 to 2.5, and most preferably from about 2.35 to 2.45), and third dielectric layer 2 c may optionally have a relatively low (compared to layer 2 b) refractive index (n) (e.g., n of from about 1.8 to 2.2, more preferably from about 1.95 to 2.1, and most preferably from about 2.0 to 2.05). In certain example embodiments, layers 2 a-2 c combine to form a good index matching stack for antireflection purposes and which also functions as a buffer against sodium migration from the glass 1. In certain example embodiments, the first dielectric layer 2 a is from about 5-30 nm thick, more preferably from about 10-20 nm thick, the second dielectric layer 2 b is from about 5-30 nm thick, more preferably from about 10-20 nm thick, and the third layer 2 c is of a lesser thickness and is from about 3-20 nm thick, more preferably from about 5-15 nm thick, and most preferably from about 6-14 nm thick. While layers 2 a, 2 b and 2 c are dielectrics in certain embodiments of this invention, one, two or all three of these layers may be dielectric or TCO in certain other example embodiments of this invention. Layers 2 b and 2 c are metal oxides in certain example embodiments of this invention, whereas layer 2 a is a metal oxide and/or nitride, or silicon nitride in certain example instances. Layers 2 a-2 c may be deposited by sputtering or any other suitable technique.

The photovoltaic device of FIG. 2 may have a sheet resistance of no greater than about 18 ohms/square, more preferably no greater than about 15 ohms/square, even more preferably no greater than about 13 ohms/square in certain example embodiments of this invention. Moreover, the FIG. 2 embodiment may have tailored transmission spectra having more than 85% (more preferably at least 87%) transmission into the semiconductor 5 in part or all of the wavelength range of from about 450-600 nm and/or 450-700 nm, where AM1.5 may have the strongest intensity, in certain example embodiments of this invention (e.g., see FIG. 4).

FIG. 4 is a percent transmission (T %) versus wavelength (nm) graph illustrating transmission spectra into a hydrogenated a-Si thin film 5 of a photovoltaic device comparing front electrode examples of the FIG. 2 embodiment of this invention versus a comparative example (ZnAlOx) where a zinc aluminum oxide TCO was used instead adjacent the semiconductor. In the 75 nm thick TiNbOx example of the FIG. 2 embodiment shown in FIG. 4, layer 4 f of the PV device was a 75 nm thick layer of TiNbO_(x) and the layer 4 e was not present; and in the 75 nm TiNbOx example of the FIG. 2 embodiment shown in FIG. 4, layer 4 f of the PV device was a 30 nm thick layer of TiNbO_(x) and layer 4 e was a 85 nm thick layer of ZnAlO_(x). It can be seen from FIG. 4 that these two example embodiments of this invention (see the circle and vertical bar lines in FIG. 4) surprisingly realized increased transmission into the semiconductor 5 compared to the comparative example (115 nm ZnAlOx as layer 4 e where layer 4 f did not exist) in at least substantial parts of the range of from 450-700 nm, more preferably the range of from 475-600 nm. This shows that the examples of this invention have increased transmission in at least a substantial part of the approximately 450-700 nm wavelength range (or in at least a substantial part of the 475-600 nm range) and thus increased photovoltaic module output power, compared to the comparative example. The stacks tested in FIG. 4 are shown in the table of FIG. 6, with the last two lines in FIG. 6 illustrating the stacks of the examples of this invention tested in FIG. 4, and the TCC-1 line in FIG. 6 illustrating the layer stack of the comparative example discussed above. The first line in FIG. 6 illustrates the stack of another comparative example tested in FIG. 4.

FIG. 3 is a cross sectional view of a photovoltaic device according to yet another example embodiment of this invention. The FIG. 3 embodiment differs from the FIG. 1-2 embodiments, for example, in that the FIG. 3 embodiment does not include a Ag conductive layer in the front electrode. Instead, the front electrode in the FIG. 3 embodiment is of or includes a TCO 4 e (e.g., including one or more layers) of or including zinc oxide, zinc aluminum oxide, tin oxide (which may or may not be doped with fluorine), tin antimony oxide, zinc tin oxide, indium tin oxide, indium zinc oxide, and/or zinc gallium aluminum oxide; and TCO buffer layer 4 f of or including TiO_(x)(:Nb) and/or TiZnO_(x)(:Al and/or Nb). The semiconductor film 5 may be of or including a-Si, or any other suitable semiconductor discussed above. Transparent conductive TiO_(x)(:Nb) and/or TiZnO_(x)(:Al and/or Nb) layer 4 f in the FIG. 3 embodiment is advantageous for the reasons set forth above in connection with the FIG. 1-2 embodiments, and is characterized by the thicknesses and resistance values discussed above.

FIG. 5 is a percent transmission (T %) versus wavelength (nm) graph illustrating transmission spectra into a hydrogenated a-Si thin film 5 of a photovoltaic device comparing a front electrode example of the FIG. 3 embodiment of this invention (see 10 ohm TCO+50 nm TiNbOx) versus a comparative example (ZnAlOx). In the comparative example, only a 700 nm thick zinc aluminum oxide TCO was used as the front electrode immediately adjacent the semiconductor film 5. In the example of the FIG. 3 embodiment tested in connection with FIG. 5, the front electrode was made up of a 700 nm thick TCO 4 e of zinc aluminum oxide and a 50 nm thick TCO 4 f of titanium niobium oxide immediately adjacent and contacting the semiconductor film 5. The stacks tested in FIG. 5 are set forth in the table of FIG. 7, with the last line in FIG. 7 representing the example according to the FIG. 3 embodiment of this invention (with an additional layer of silicon oxynitride between the glass 1 and the front electrode), and the next to last line in FIG. 7 representing the comparative example of FIG. 5. It can be seen from FIG. 5 that the example embodiment of this invention (see the circle line in FIG. 5) surprisingly realized increased transmission into the semiconductor 5 compared to the comparative example (see the vertical bar line in FIG. 5) in at least a substantial part of the range of from 450-700 nm, more preferably at least in a substantial part of the range of from 475-600 nm. This shows that the examples of this invention have increased transmission in at least a substantial part of the approximately 450-700 nm wavelength range (or in at least a substantial part of the 475-600 nm range) and thus increased photovoltaic module output power, compared to the comparative example.

While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. 

1-12. (canceled)
 13. A photovoltaic device comprising: a front glass substrate; a front electrode; a semiconductor film, wherein the front electrode is located between at least the front substrate and the semiconductor film; and wherein the front electrode of the photovoltaic device comprises a first conductive layer and a second conductive layer, wherein the second conductive layer is located between at least the first conductive layer and the semiconductor film, and is part of the front electrode, and wherein the second conductive layer comprises titanium oxide doped with niobium, and wherein the second conductive layer has a refractive index (n) of at least about 2.2.
 14. The photovoltaic device of claim 13, wherein the titanium oxide is doped with from about 0.01 to 10% Nb, and may optionally further include aluminum.
 15. The photovoltaic device of claim 13, wherein the titanium oxide is doped with from about 0.1 to 5% Nb.
 16. The photovoltaic device of claim 13, further comprising: a first layer comprising one or more of silicon nitride, silicon oxide, silicon oxynitride, and/or tin oxide; a second layer comprising one or more of titanium oxide and/or niobium oxide, wherein at least the first layer is located between the front substrate and the second layer, wherein the first layer and the second layer are located between at least the front substrate and the front electrode; a third layer comprising zinc oxide and/or zinc aluminum oxide; and wherein the first conductive layer comprises silver, which is contacts said third layer comprising zinc oxide and/or zinc aluminum oxide, and wherein said second conductive layer comprising titanium oxide doped niobium is provided between at least the semiconductor film and the first conductive layer comprising silver.
 17. The photovoltaic device of claim 13, wherein the second conductive layer comprising titanium oxide doped niobium has a refractive index (n) of at least about 2.2.
 18. The photovoltaic device of claim 13, wherein the second conductive layer comprising titanium oxide doped niobium directly contacts the semiconductor film.
 19. The photovoltaic device of claim 13, wherein first conductive layer is a TCO comprising one or more of zinc oxide, zinc aluminum oxide, tin oxide, indium-tin-oxide, indium zinc oxide, tin antimony oxide, and zinc gallium aluminum oxide.
 20. The photovoltaic device of claim 13, wherein the first conductive layer comprises silver.
 21. The photovoltaic device of claim 13, wherein the semiconductor film comprises (i) a-Si, or (ii) a first layer comprising CdS and a second layer comprising CdTe.
 22. The photovoltaic device of claim 13, wherein the photovoltaic device, including the front electrode and front substrate, has an ambient transmission of at least 85% into the semiconductor film in at least a substantial part of the wavelength range of from about 450-600 nm.
 23. The photovoltaic device of claim 13, wherein the photovoltaic device, including the front electrode and front substrate, has an ambient transmission of at least 87% into the semiconductor film in at least a substantial part of the wavelength range of from about 450-600 nm. 